Proximity Gettering Design of Hydrocarbon-Molecular-Ion-Implanted Silicon Wafers Using Dark Current Spectroscopy for CMOS Image Sensors.
Kazunari KuritaTakeshi KadonoSatoshi ShigematsuRyo HiroseRyosuke OkuyamaAyumi Onaka-MasadaHidehiko OkudaYoshihiro KogaPublished in: Sensors (2019)