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Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films.

Shou-Yi KuoKou-Chen LiuFang-I LaiJui-Fu YangWei-Chun ChenMing-Yang HsiehHsin-I LinWoei-Tyng Lin
Published in: Microelectron. Reliab. (2010)
Keyphrases
  • electrical properties
  • silicon nitride
  • power consumption
  • film thickness
  • relevance feedback
  • radio frequency
  • structural information
  • leakage current
  • neural network