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Structural comparison of SU-8 microtubes fabricated by direct laser writing and UV lithography.
Richa Mishra
Tapas Kumar Maiti
Tarun Kanti Bhattacharyya
Published in:
IEEE SENSORS (2017)
Keyphrases
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electron beam
high speed
databases
genetic algorithm
case study
structural information
laser beam
structural models
range sensors
structural analysis
statistical analysis
x ray
control system
three dimensional
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information systems
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