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Hydrophilic Direct Bonding of MgO/MgO for High-Temperature MEMS Devices.
Jia Liu
Pinggang Jia
Jiashun Li
Fei Feng
Ting Liang
Wenyi Liu
Jijun Xiong
Published in:
IEEE Access (2020)
Keyphrases
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embedded systems
high temperature
electron beam
machine learning
artificial intelligence
protein folding
database
databases
learning algorithm
diesel engine