Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes.
Aniello EspositoMauro CiappaWolfgang FichtnerPublished in: Microelectron. Reliab. (2011)
Keyphrases
- high performance computing
- microscopy images
- electron microscopy
- scientific computing
- computational science
- multi channel
- massively parallel
- energy efficiency
- computing systems
- power consumption
- parallel computing
- grid computing
- computing resources
- x ray
- low cost
- fault tolerance
- confocal images
- computing environments
- energy consumption
- artificial intelligence
- b spline