Wafer-level fabrication of vacuum-gap Fabry-Pérot resonators with quality factors exceeding one billion.
Naijun JinYifan LiuDahyeon LeeHaotian ChengCharles A. McLemoreSamuel HalladayYizhi LuoDavid MasonScott A. DiddamsFranklyn QuinlanPeter T. RakichPublished in: OFC (2024)
Keyphrases
- integrated circuit
- high quality
- data quality
- individual level
- key factors
- high speed
- higher level
- fine grained
- factors influencing
- levels of abstraction
- higher quality
- high density
- low quality
- main factors
- factors that affect
- software quality
- factors affecting
- neural network
- quality control
- quality measures
- multiscale
- case study
- information systems
- machine learning