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Ultrathin Atomic-Layer-Deposited In2O3 Radio-Frequency Transistors with Record High fT of 36 GHz and BEOL Compatibility.

Dongqi ZhengAdam CharnasJian-Yu LinJackson AndersonDana WeinsteinPeide D. Ye
Published in: VLSI Technology and Circuits (2023)
Keyphrases
  • radio frequency
  • frequency band
  • electrical properties
  • power consumption
  • high speed
  • low power
  • multiscale
  • computational complexity
  • relevance feedback
  • high frequency
  • phased array