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Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications.

Sven SchroderOzgu DoganJessica SchneidewindGabriel BertottiStefan KeilHassan GargouriMichael ArensEvelin BroseJürgen BrunsDirk WolanskyBernd TillackStefano VassanelliBernd SzyszkaRoland Thewes
Published in: IWASI (2015)
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