Thin Film of Vacuum Sputtering Process.

Wen-Hsien Ho Jinn-Tsong Tsai Gong-Ming Hsu Jyh-Horng Chou

Published in: IEEE Trans Autom. Sci. Eng. (2010)

Keyphrases

thin film
case based reasoning
databases
expert systems
development process
multi layer
high density
electron microscopy