A fast electron beam lithography simulator based on the Boltzmann transport equation.
Nikos GlezosIoannis RaptisPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1996)
Keyphrases
- electron beam lithography
- x ray
- electron beam
- simulation model
- inertia weight particle swarm optimization
- test bed
- neural network
- hamilton jacobi
- numerical solution
- differential equations
- mathematical model
- database
- integrated circuit
- spherical harmonics
- velocity field
- real robot
- numerical stability
- information systems
- information retrieval