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Neural Networks Fusion to Overlay Control System for Lithography Process.
Jihyun Kim
Sanghyeok Seo
Sung-Shick Kim
Published in:
Australian Conference on Artificial Intelligence (2006)
Keyphrases
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neural network
control system
genetic algorithm
artificial neural networks
pattern recognition
fuzzy logic
data mining
machine learning
artificial intelligence
decision making
multiscale
back propagation
information fusion
process control
electron beam