Iterative Deconvolution for Exposure Planning in Scanning Laser Lithography.

Omid T. Ghalehbeygi John O'Connor Ben S. Routley Andrew J. Fleming

Published in: ACC (2018)

Keyphrases

electron beam lithography
least squares
planning problems
denoising
motion planning
ai planning
structured light
blind deconvolution
image processing
x ray
heuristic search
iterative methods
soft thresholding