Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al $_{\bf 2}$O$_{\bf 3}$ and Parylene C for Biomedical Implantable Devices.
Xianzong XieLoren RiethRyan CaldwellMohit DiwekarPrashant TathireddyRohit SharmaFlorian SolzbacherPublished in: IEEE Trans. Biomed. Eng. (2013)