Concave Microlens Array Mold Fabrication in Photoresist Using UV Proximity Printing

Tsung-Hung Lin Hsiharng Yang Ching-Kong Chao

Published in: CoRR (2007)

Keyphrases

integrated circuit
high speed
high density
objective function
low cost
piecewise linear
thin film
focal plane
multiresolution
electron beam
antenna array
real time
genetic algorithm
covering arrays
convexity properties