A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies.
Abhitosh VaisBrent HsuOlga SyshchykHao YuAliReza AlianYves MolsKomal Vondkar KodandaramaBernardette KunertNiamh WaldronEddy SimoenNadine CollaertPublished in: IRPS (2021)