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A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography.

Guixin ZhangHui TangXun ChenXiaohui GuoJiedong LiHaoyu PanShuo Li
Published in: ICIRA (1) (2019)
Keyphrases
  • learning algorithm
  • reinforcement learning
  • low cost
  • piecewise linear
  • electron beam