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Modeling and control of an atomic force microscope using a piezoelectric tuning fork for force sensing.

T.-J. YehChai-De WangTing-Ying Wu
Published in: Simul. Model. Pract. Theory (2008)
Keyphrases
  • force sensing
  • force feedback
  • robotic arm
  • control system
  • degrees of freedom
  • visual servoing