Nonlinear robust stage control of atomic force microscope.

Takashi Nakakuki Makoto Ogawa Chiharu Ishii

Published in: CCA (2012)

Keyphrases

impedance control
tracking control
control theory
highly nonlinear
robotic manipulator
real time
neural network
web services
principal component analysis
robotic systems
control method
visual inspection
visual feedback
adaptive neural
force control
position control