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Photomasks Fabrication Based on Optical Reduction for Microfluidic Applications.
Emanuele Orabona
Alessandro Caliò
Ivo Rendina
Luca De Stefano
Mario Medugno
Published in:
Micromachines (2013)
Keyphrases
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electron beam
integrated circuit
learning algorithm
clustering algorithm
high density
database
genetic algorithm
high speed
light scattering
machine learning
multiresolution
attribute reduction
waveguide
optical imaging