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Model-based control of rapid thermal processing for semiconductor wafers.
Jon L. Ebert
Dick de Roover
La Moyne L. Porter
V. A. Lisiewicz
Sarbajit Ghosal
Robert L. Kosut
Abbas Emami-Naeini
Published in:
ACC (2004)
Keyphrases
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semiconductor manufacturing
process control
real time
data processing
infrared
information processing
control system
database
control theory
production line
data sets
data driven
website
computer vision
data acquisition
control strategy
control method
artificial intelligence
control problems
electrical power