V. A. Lisiewicz

Publication Activity (10 Years)

Years Active: 2004-2004
Publications (10 Years): 0

Publications

Jon L. Ebert, Dick de Roover, La Moyne L. Porter, V. A. Lisiewicz, Sarbajit Ghosal, Robert L. Kosut, Abbas Emami-Naeini
Model-based control of rapid thermal processing for semiconductor wafers. ACC (2004)