Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control.
Patrick C. DeenenRick A. M. AdriaensenJohn W. FowlerPublished in: WSC (2022)
Keyphrases
- real world
- semiconductor manufacturing
- process control
- integrated circuit
- wide range
- synthetic data
- control system
- industrial production
- manufacturing process
- case study
- production system
- real life
- information systems
- artificial intelligence
- raw material
- closed loop
- digital content
- image processing
- control problems
- production process
- genetic algorithm
- data sets