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Future electron-beam lithography and implications on design and CAD tools.
Jack J. H. Chen
Faruk Krecinic
Jen-Hom Chen
Raymond P. S. Chen
Burn J. Lin
Published in:
ASP-DAC (2011)
Keyphrases
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design process
computer aided
design decisions
design tools
database
design principles
design methodology
long term
software tools
design methodologies
software environment
current status
computer aided design
knowledge based systems
decision support
three dimensional
artificial intelligence
real world