Login / Signup
Parameters extraction of hafnium based gate oxide capacitors.
T. Nguyen
C. Busseret
Liviu Militaru
A. Poncet
D. Aimé
Nicolas Baboux
Carole Plossu
Published in:
Microelectron. Reliab. (2007)
Keyphrases
</>
sensitivity analysis
parameter values
input parameters
parameter selection
field effect transistors
parameter estimation
parameter space
measured data
data sets
genetic algorithm
three dimensional
information extraction
low cost
parameter settings
mathematical analysis
metal oxide