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Optical properties of photo-electrochemical etching of anisotropic silicon (110).

Maryam AmirhoseinyZainuriah HassanNg ShaShiong
Published in: IEICE Electron. Express (2012)
Keyphrases
  • optical properties
  • plasma etching
  • thin film
  • high density
  • integrated circuit
  • linear relationship
  • multispectral images
  • wide field of view
  • field effect transistors
  • high speed
  • multi view