Trilayer nanoimprint fabrication and simulation of the silicon nanowire sensor for gas detection.
Jing WanShao-Ren DengYifang ChenEjaz HuqRan LiuXin-Ping QuPublished in: NEMS (2009)
Keyphrases
- high density
- high speed
- genetic algorithm
- real time
- false alarms
- detection algorithm
- detection rate
- simulation study
- automatic detection
- object detection
- detection accuracy
- sensor networks
- plasma etching
- sensor data
- simulation model
- simulation models
- forward looking infrared
- detection method
- false positives
- intrusion detection
- mathematical analysis
- semiconductor devices