Determination of electrical and mechanical parameters in capacitive MEMS accelerometers using electrical measurements.
Stanislaw KalicinskiTomasz BieniekPawel JanusPiotr GrabiecPublished in: Microelectron. Reliab. (2011)
Keyphrases
- electro mechanical
- transmission line
- electrical power
- measured data
- physical characteristics
- engineering and computer science
- distribution networks
- input parameters
- power grid
- measurement data
- low voltage
- electrical activity
- active power
- maximum likelihood
- neural network
- parameter settings
- expectation maximization
- electrical properties
- parameter determination
- probabilistic model