Login / Signup

High Performance Bidirectional Thermal Gas Flow Sensor of (100) Silicon Single-Sided Fabrication by 45°-Tilted Dicing.

Yan ZhangDongcheng XieYujie YangRuichen LiuChong XingFeng XueDongliang ChenLei Xu
Published in: SENSORS (2023)
Keyphrases
  • high density
  • high speed
  • genetic algorithm
  • real time
  • neural network
  • sensor data
  • semiconductor devices
  • evolutionary algorithm
  • mobile robot
  • low cost
  • data fusion
  • electrical properties
  • silicon on insulator