Neuro-predictive process control using online controller adaptation.

Alexander G. Parlos Sanjay Parthasarathy Amir F. Atiya

Published in: ACC (2000)

Keyphrases

process control
control system
pi controller
neural network
intelligent control
closed loop

real time
product quality
manufacturing process
control algorithm
online learning
semiconductor manufacturing

control scheme
control strategy
control architecture
fuzzy logic
control method
control law

graduate education
feedback control
quality control
fuzzy controller
reinforcement learning
learning algorithm