Neuro-predictive process control using online controller adaptation.
Alexander G. ParlosSanjay ParthasarathyAmir F. AtiyaPublished in: ACC (2000)
Keyphrases
- process control
- control system
- pi controller
- neural network
- intelligent control
- closed loop
- real time
- product quality
- manufacturing process
- control algorithm
- online learning
- semiconductor manufacturing
- control scheme
- control strategy
- control architecture
- fuzzy logic
- control method
- control law
- graduate education
- feedback control
- quality control
- fuzzy controller
- reinforcement learning
- learning algorithm