Massively parallel algorithms for scattering in optical lithography.
Roberto GuerrieriKarim H. TadrosJohn K. GamelinAndrew R. NeureutherPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1991)
Keyphrases
- parallel algorithm
- electron beam
- multiple scattering
- shared memory
- parallel computing
- parallel computation
- massively parallel
- parallel programming
- x ray
- parallel computers
- combinatorial search problems
- refractive index
- pc cluster
- parallel version
- parallel implementations
- integrated circuit
- discovery of association rules
- cluster of workstations
- multistage