Process technology for IBM 14-nm processor designs featuring silicon-on-insulator FinFETs.
Scott R. StifflerRavikumar RamachandranW. Kirklen HensonNoah D. ZamdmerKevin McStayGiuseppe La RosaKevin M. BoydSungjae LeeClaude OrtollandPaul C. ParriesPublished in: IBM J. Res. Dev. (2018)