A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14µm DRAM Generation and Beyond.
Chul-Hong ParkSoo-Han ChoiSang-Uhk RhieDong-Hyun KimJun-Seong ParkTae-Hwang JangJi-Soong ParkYoo-Hyon KimMoon-Hyun YooJeong-Taek KongPublished in: ISQED (2002)
Keyphrases
- statistical model
- mathematical model
- theoretical analysis
- probabilistic model
- study proposes
- cost function
- input data
- high order
- optimization method
- detection method
- prediction model
- gaussian distribution
- high accuracy
- objective function
- em algorithm
- autoregressive
- parameter estimation
- significant improvement
- computational model
- reconstruction method
- test data
- modeling method
- generation method
- evaluation method
- evaluation model
- closed form
- classification method
- similarity measure
- feature set
- statistical methods
- preprocessing
- prior knowledge
- maximum likelihood
- bp neural network
- network model
- monte carlo simulation
- hybrid method
- dynamic programming
- genetic algorithm
- artificial neural networks
- markov model
- linear model
- support vector machine
- linear regression
- bayesian framework
- parameter space
- sensitivity analysis
- energy function