Defect detection of IC wafer based on two-dimension wavelet transform.
Hongxia LiuWen ZhouQianwei KuangLei CaoBo GaoPublished in: Microelectron. J. (2010)
Keyphrases
- defect detection
- wavelet transform
- integrated circuit
- feature extraction
- multiscale
- multiresolution
- image compression
- image coding
- subband
- wavelet coefficients
- high frequency
- wavelet analysis
- low frequency
- wavelet domain
- automated visual inspection
- haar wavelet
- wavelet filters
- shift invariance
- massively parallel
- lifting scheme
- textured surfaces
- multiresolution representation
- neural network
- image fusion algorithm
- multi resolution analysis
- multiple dimensions
- semiconductor manufacturing
- feature vectors
- computer vision
- image segmentation
- wavelet packet
- feature space