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Modeling the Plasma Enhanced Chemical Vapor Deposition Process Using Neural Networks and Genetic Algorithms.

Seung Soo HanGary S. May
Published in: ICTAI (1994)
Keyphrases
  • neural networks and genetic algorithms
  • chemical vapor deposition
  • process model
  • thin film
  • high density
  • machine learning
  • artificial intelligence
  • expert systems