Quantitative Evaluation of Line-Edge Roughness in Various FinFET Structures: Bayesian Neural Network With Automatic Model Selection.
Sangho YuSang Min WonHyoung Won BaacDonghee SonChanghwan ShinPublished in: IEEE Access (2022)
Keyphrases
- quantitative evaluation
- neural network
- automatic model selection
- ground truth
- factor analysis
- mixture model
- qualitative evaluation
- model selection
- edge detection
- quality assessment
- maximum likelihood
- bayesian networks
- unsupervised image segmentation
- high resolution
- information criterion
- gaussian mixture model
- high quality
- machine learning