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Ultra Precise Positioning of a Stage Driven by Pneumatic Bellows.

Toshinori FujitaKazutoshi SakaiYusuke TakagiKenji KawashimaToshiharu Kagawa
Published in: Int. J. Autom. Technol. (2011)
Keyphrases
  • high speed
  • data driven
  • control system
  • artificial intelligence
  • information systems
  • image processing
  • degrees of freedom
  • robot arm
  • multiple stages