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Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm.
Yukio Matsuyama
Hisafumi Iwata
Hitoshi Kubota
Yasuo Nakagawa
Published in:
Systems and Computers in Japan (1990)
Keyphrases
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visual inspection
pattern matching algorithm
pattern matching
matching algorithm
aho corasick
string matching
image analysis
compression algorithm
query patterns
laser scanning
fluorescence microscopy images
tree patterns
computer vision
multiresolution
database
databases