Damping-enabling technologies for broadband control of piezo-stages: A survey.

Zhong Chen Xineng Zhong Junjie Shi Xianmin Zhang

Published in: Annu. Rev. Control. (2021)

Keyphrases

enabling technologies
control strategy
control system
dynamic model
control method
open loop
adaptive control
feedback control
website
multistage
data acquisition
closed loop
operating conditions
control problems
control theory