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A novel monolithic array of multiple metal oxide sensors for E-Nose applications via selective on-chip annealing of nanolayered ALD stacks.

Akhilesh TanneemFatma Patlar AkbulutBongmook LeeVeena Misra
Published in: IEEE SENSORS (2019)
Keyphrases
  • focal plane
  • high speed
  • metal oxide
  • image sensor
  • data fusion
  • programmable logic
  • databases
  • data structure
  • video sequences
  • digital images
  • low cost
  • high density
  • random access memory