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An Optical Coordinate Measuring Machine for Nanoscale Dimensional Metrology.
Eric Kirkland
Thomas R. Kurfess
Steven Y. Liang
Published in:
J. Adv. Comput. Intell. Intell. Informatics (2004)
Keyphrases
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printed circuit boards
multi dimensional
camera calibration
clustering algorithm
case study
single view
process control
optical fiber
atomic force microscopy
database
computer vision
image capture
closely spaced