Guiding Template Design for Lamellar DSA with Multiple Patterning and Self-Aligned Via Process.

An-Jie Shih Shao-Yun Fang Yi-Yu Liu

Published in: ICCAD (2020)

Keyphrases

design process
decision making
design tools
design patterns
modeling tool
process oriented
design methodology
engineering design
design principles
real time
user experience
metamodel
software architecture
modeling language
process model
search engine
design space
machine learning
neural network