GAN-OPC: Mask Optimization With Lithography-Guided Generative Adversarial Nets.
Haoyu YangShuhe LiZihao DengYuzhe MaBei YuEvangeline F. Y. YoungPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2020)
Keyphrases
- optimization problems
- optimization algorithm
- optimization process
- global optimization
- optimization model
- learning algorithm
- data driven
- optimal design
- constrained optimization
- optimization methods
- combinatorial optimization
- optimization method
- generative model
- active learning
- multi agent
- three dimensional
- case study
- image processing