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CMOS-compatible SOI micro-hotplate-based oxygen sensor.

Viorel AvramescuAndrea De LucaMihai BrezeanuSyed Zeeshan AliFlorin UdreaOctavian BuiuCornel CobianuBogdan-Catalin SerbanJulian GardnerViorel DumitruAlisa Stratulat
Published in: ESSDERC (2016)
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