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Yield Optimization by Means of Process Parameters Estimation: Comparison Between ABB and ASV Techniques.

Mauro OlivieriMirko ScaranaGiuseppe ScottiAlessandro Trifiletti
Published in: PATMOS (2004)
Keyphrases
  • parameters estimation
  • optimization algorithm
  • optimization process
  • data mining
  • evolutionary algorithm
  • higher order
  • shape features