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Yaw error correction of ultra-precision stage for scanning beam interference lithography systems.

Sen LuKaiming YangYu ZhuLeijie WangMing ZhangJin Yang
Published in: J. Syst. Control. Eng. (2018)
Keyphrases
  • error correction
  • error detection
  • error correcting
  • high speed
  • watermarking scheme
  • barcode