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Multiplexed MPC for Multizone Thermal Processing in Semiconductor Manufacturing.
Keck Voon Ling
Weng Khuen Ho
Bing Fang Wu
Andreas Lo
Han Yan
Published in:
IEEE Trans. Control. Syst. Technol. (2010)
Keyphrases
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semiconductor manufacturing
discrete event simulation
infrared
real time
multi sensor
process control
database
information processing
machine learning
data processing
databases
neural network
image analysis
multistage
high temperature