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A full-factory simulator as a daily decision-support tool for 300MM wafer fabrication productivity.
Sugato Bagchi
Ching-Hua Chen-Ritzo
Sameer T. Shikalgar
Michael Toner
Published in:
WSC (2008)
Keyphrases
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wafer fabrication
dispatching rule
simulation model
rms error
software development
simulation environment
average error
test bed
daily activities
clinical setting
real time
evolutionary algorithm
product quality
return on investment