Sameer T. Shikalgar

Publication Activity (10 Years)

Years Active: 2002-2008
Publications (10 Years): 0

Publications

Sugato Bagchi, Ching-Hua Chen-Ritzo, Sameer T. Shikalgar, Michael Toner
A full-factory simulator as a daily decision-support tool for 300MM wafer fabrication productivity. WSC (2008)
Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair
Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation. WSC (2003)
Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair
Wafer fabrication: 300mm wafer fabrication line simulation model. WSC (2002)