Wafer fabrication: 300mm wafer fabrication line simulation model.

Sameer T. Shikalgar David Fronckowiak Edward A. MacNair

Published in: WSC (2002)

Keyphrases

wafer fabrication
simulation model
agent based simulation
simulation models
dispatching rule
mathematical model
discrete event
simulation environment
simulation tool
line segments
cross section
temperature field
multi agent
finite element
agent based models
special case
matlab simulink
image sequences