Sliding Mode Observer Based Multi-Layer Metal Plates Core Temperature On-Line Estimation for Semiconductor Intelligence Manufacturing.
Min-Che TsaiChao-Chung PengPublished in: IEEE Access (2020)
Keyphrases
- multi layer
- sliding mode
- high temperature
- stability analysis
- neural nets
- neural network
- variable structure
- sliding mode control
- intelligent systems
- control strategy
- field effect transistors
- dynamic model
- robot manipulators
- artificial intelligence
- control scheme
- manufacturing systems
- control law
- adaptive control
- real time
- thin film